US Patent 11566325 Silicon carbonitride gapfill with tunable carbon content
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US Patent 11566325 Silicon carbonitride gapfill with tunable carbon content
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
115663250
Date of Patent
January 31, 2023
0Patent Application Number
171204940
Date Filed
December 14, 2020
0Patent Citations
Patent Primary Examiner
CPC Code
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