US Patent 11569826 Time-domain incremental two-step capacitance-to-digital converter

An exemplary incremental two-step capacitance-to-digital converter (CDC) with a time-domain sigma-delta modulator (TDΔΣM) includes a voltage-controlled oscillator (VCO)-based integrator that can be used in a low-order loop configuration. Example prototypes are disclosed, which when fabricated in 40-nm CMOS technology, provides CDC resolution of 0.29 fF while dissipating only 0.083 nJ per conversion.