Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
February 21, 2023
Patent Application Number
16872622
Date Filed
May 12, 2020
Patent Citations Received
Patent Primary Examiner
In a scheme in which a top ring is held to an end portion of a swing arm, the present invention improves accuracy of polishing end point detection. A polishing apparatus for polishing between a polishing pad
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