US Patent 11584642 MEMS resonator
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Edits on 26 Mar, 2023
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US Patent 11584642 MEMS resonator
Article
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
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Patent Applicant
Patent Jurisdiction
Patent Number
115846420
Date of Patent
February 21, 2023
0Patent Application Number
168617780
Date Filed
April 29, 2020
0Patent Citations
Patent Primary Examiner
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