Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
February 21, 2023
0Patent Application Number
169856350
Date Filed
August 5, 2020
0Patent Citations
Patent Primary Examiner
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on effectively sealed flow restrictors which can eliminate leakage of process gas around the flow restrictors. In one embodiment, a seal for a flow restrictor is disclosed, the seal comprising a plastic cylinder which is shrink fit onto a sealing portion of the flow restrictor. In another embodiment, a seal for a flow restrictor is disclosed, the seal having a first sealing ring with a flow aperture, a flow restrictor installed into the flow aperture.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.