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US Patent 11587781 Laser-driven light source with electrodeless ignition

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
May 24, 2021
Date of Patent
February 21, 2023
Patent Application Number
17328433
Patent Citations
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US Patent 10078167 Laser-operated light source
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US Patent 10109473 Mechanically sealed tube for laser sustained plasma lamp and production method for same
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US Patent 10186414 Dual parabolic laser driven sealed beam lamps
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US Patent 10186416 Apparatus and a method for operating a variable pressure sealed beam lamp
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US Patent 10203247 Systems for providing illumination in optical metrology
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US Patent 10222701 Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
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US Patent 10217625 Continuous-wave laser-sustained plasma illumination source
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US Patent 10770282 Laser-pumped plasma light source and plasma ignition method
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US Patent 10008378 Laser driven sealed beam lamp with improved stability
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US Patent 10057973 Electrodeless single low power CW laser driven plasma lamp
Patent Citations Received
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US Patent 12014918 Laser-driven light source with electrodeless ignition
0
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US Patent 11784037 Laser-driven light source with electrodeless ignition
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11587781
Patent Primary Examiner
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Christopher M Raabe
CPC Code
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H01J 61/54
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H01J 65/00
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H01J 65/04

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