US Patent 11587926 Semiconductor structure

Semiconductor structures are provided. Each transistor includes a first source/drain region over a semiconductor fin, a second source/drain region over the semiconductor fin, a channel region in the semiconductor fin and between the first and second source/drain regions, and a metal gate electrode formed on the channel region and extending in a second direction. In a first transistor of the transistors, the first source/drain region is formed between the metal gate electrode of the first transistor and the metal gate electrode of a second transistor of the transistors. The second source/drain region is formed between the metal gate electrode of the first transistor and the dielectric-base dummy gate. A first contact of the first source/drain region is separated from a spacer of the metal gate electrode of the first transistor. A second contact of the second source/drain region is in contact with a spacer of the dielectric-base dummy gate.