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US Patent 11591693 Ceramic showerheads with conductive electrodes
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Is a
Patent
Current Assignee
Applied Materials
Date Filed
February 16, 2021
Date of Patent
February 28, 2023
Patent Applicant
Applied Materials
Patent Application Number
17176411
Patent Citations
US Patent 10755900 Multi-layer plasma erosion protection for chamber components
US Patent 10920319 Ceramic showerheads with conductive electrodes
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11591693
Patent Primary Examiner
Rudy Zervigon
CPC Code
H01J 37/32027
H01J 37/32036
H01J 37/32082
H01J 37/32091
H01J 15/00
C23C 16/507
C23C 16/509
H01J 37/32018
H01J 37/32009
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