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US Patent 11592812 Sensor metrology data integration
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Patent
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Date Filed
February 14, 2020
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Date of Patent
February 28, 2023
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Patent Applicant
Applied Materials
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Patent Application Number
16791081
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Patent Citations
US Patent 11037573 Management and execution of equipment maintenance
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US Patent 11263737 Defect classification and source analysis for semiconductor equipment
US Patent 11279032 Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11592812
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Patent Primary Examiner
Crystal J Barnes-Bullock
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CPC Code
G06F 11/3089
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G06F 11/3447
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G06F 11/3466
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G06F 11/3495
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G05B 19/404
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G05B 19/4183
0
G05B 19/4184
0
G05B 19/41875
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G05B 19/41885
0
G05B 2219/31357
0
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