US Patent 11594400 Multi zone gas injection upper electrode system
Patent 11594400 was granted and assigned to Lam Research on February, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 10, 2020
Date of Patent
February 28, 2023
Patent Applicant
Patent Application Number
16845723
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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