Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 28, 2023
0Patent Application Number
172232760
Date Filed
April 6, 2021
0Patent Citations
Patent Primary Examiner
An object is to control composition and a defect of an oxide semiconductor, another object is to increase a field effect mobility of a thin film transistor and to obtain a sufficient on-off ratio with a reduced off current. A solution is to employ an oxide semiconductor whose composition is represented by InMO
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