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US Patent 11600715 FETs and methods of forming FETs
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Current Assignee
Taiwan Semiconductor Manufacturing Company
Date Filed
October 21, 2019
Date of Patent
March 7, 2023
Patent Applicant
Taiwan Semiconductor Manufacturing Company
Patent Application Number
16659124
Patent Citations
US Patent 10453943 FETS and methods of forming FETS
US Patent 10014224 Structure and formation method of fin-like field effect transistor
US Patent 10062772 Preventing bridge formation between replacement gate and source/drain region through STI structure
US Patent 10164098 Method of manufacturing semiconductor device
US Patent 10297601 Semiconductor devices with layers commonly contacting fins and methods of manufacturing the same
US Patent 10483377 Devices and methods of forming unmerged epitaxy for FinFet device
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11600715
Patent Primary Examiner
Joseph C. Nicely
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