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US Patent 11602040 Waveguide injecting unit
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Patent
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Date Filed
May 18, 2021
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Date of Patent
March 7, 2023
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Patent Application Number
17323973
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Patent Citations
US Patent 11244810 Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus
US Patent 10601125 Electrically short antennas with enhanced radiation resistance
US Patent 10327321 Chambers for microwave plasma generation
Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11602040
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Patent Primary Examiner
Srinivas Sathiraju
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