US Patent 11610764 Plasma source and method of operating the same
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Patent Inventor Names
Andries Rijfers0
Yves Lodewijk Maria Creyghton0
Edits on 25 Apr, 2023
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US Patent 11610764 Plasma source and method of operating the same
Article
A plasma source (
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Is a
Patent Jurisdiction
Patent Number
116107640
Date of Patent
March 21, 2023
0Patent Application Number
172541730
Date Filed
June 20, 2019
0Patent Citations
Patent Primary Examiner
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