Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas Brezoczky0
Lakshmikanth Krishnamurthy Shirahatti0
Nitin Bharadwaj Satyavolu0
Srinivasa Rao Yedla0
Bhaskar Prasad0
Hari Prasath Rajendran0
Kirankumar Neelasandra Savandaiah0
Date of Patent
March 21, 2023
0Patent Application Number
170248020
Date Filed
September 18, 2020
0Patent Citations
...
Patent Primary Examiner
In one example, an electrostatic chuck comprises a chuck body having a top surface configured to support a substrate and a bottom surface opposite the top surface. The chuck body comprises one or more chucking electrodes, and one or more heating elements. The chuck body further comprises first terminals disposed on the bottom surface of the chuck body and coupled with the one or more heating elements, second terminals disposed on the bottom surface of the chuck body and coupled with the one or more chucking electrodes, and third terminals disposed on the bottom first surface of the chuck body and coupled with the one or more chucking electrodes.
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