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US Patent 11618940 Method of manufacturing display apparatus

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Uno Chang0

Chunyoung Park0

Kyubum Kim0

Sungjin Kim0

Date of Patent

April 4, 2023

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Patent Application Number

165318660

Date Filed

August 5, 2019

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Patent Citations

US Patent 10626492 Mask assembly for thin film deposition and method of manufacturing the same

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US Patent 10837111 Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier

US Patent 10304713 Substrate carrier with integrated electrostatic chuck

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US Patent 10651385 Deposition mask and method of manufacturing display device using the same

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Patent Primary Examiner

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CPC Code

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A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

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