US Patent 11621329 Epitaxial oxide materials, structures, and devices

In some embodiments, a semiconductor structure includes: a first region comprising a first epitaxial oxide material; a second region comprising a second epitaxial oxide material; and a chirp layer located between the first and the second regions. The chirp layer can include alternating layers of a plurality of wide bandgap epitaxial oxide material layers (WBG layers) and a plurality of narrow bandgap epitaxial oxide material layers (NBG layers), wherein thicknesses of the NBG layers and the WBG layers change throughout the chirp layer. The WBG layer can comprise (Al