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US Patent 11632096 Transversely-excited film bulk acoustic resonator comprising small cells

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Bryant Garcia0
Greg Dyer0
Neal Fenzi0
Ryo Wakabayashi0
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 US Patent 11632096 Transversely-excited film bulk acoustic resonator comprising small cells

Article

Acoustic resonator devices are disclosed. An acoustic resonator device includes a plurality of cells electrically connected in parallel. Each cell includes an interdigital transducer (IDT) on a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers.

Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116320960
Date of Patent
April 18, 2023
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Patent Application Number
175423000
Date Filed
December 3, 2021
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Patent Citations
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US Patent 10079414 Switched multiplexer with flat group delay and channelized limiting
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US Patent 10187039 Filter devices having reduced spurious emissions from lamb waves
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US Patent 10200013 Micro-transfer-printed acoustic wave filter device
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US Patent 10211806 Guided wave devices with embedded electrodes and non-embedded electrodes
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US Patent 10284176 Temperature compensated surface acoustic wave device and methods of manufacturing the same
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US Patent 10491192 Transversely-excited film bulk acoustic resonator
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US Patent 10601392 Solidly-mounted transversely-excited film bulk acoustic resonator
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US Patent 10637438 Transversely-excited film bulk acoustic resonators for high power applications
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US Patent 10644674 Multiplexer, radio-frequency front-end circuit, and communication device
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US Patent 10756697 Transversely-excited film bulk acoustic resonator
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US Patent 10790802 Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
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US Patent 10797675 Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
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US Patent 10812048 Acoustic wave filter device, radio-frequency front-end circuit, and communication apparatus
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US Patent 10819309 Transversely-excited film bulk acoustic resonator package and method
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US Patent 10826462 Transversely-excited film bulk acoustic resonators with molybdenum conductors
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US Patent 10868510 Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer
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US Patent 10868512 High power transversely-excited film bulk acoustic resonators on Z-cut lithium niobate
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US Patent 10868513 Transversely-excited film bulk acoustic filters with symmetric layout
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US Patent 10911017 Solidly mounted transversely excited film bulk acoustic resonator using rotated Z-cut lithium niobate
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US Patent 10911021 Transversely-excited film bulk acoustic resonator with lateral etch stop
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US Patent 10911023 Transversely-excited film bulk acoustic resonator with etch-stop layer
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US Patent 10917070 Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
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US Patent 10917072 Split ladder acoustic wave filters
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US Patent 10985726 Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
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US Patent 10985728 Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
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US Patent 10985730 Filter devices having high power transversely-excited film bulk acoustic resonators
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US Patent 10992282 Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
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US Patent 10992283 High power transversely-excited film bulk acoustic resonators on rotated Z-cut lithium niobate
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US Patent 10992284 Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
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US Patent 10998877 Film bulk acoustic resonator fabrication method with frequency trimming based on electric measurements prior to cavity etch
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US Patent 10998882 XBAR resonators with non-rectangular diaphragms
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US Patent 11003971 Ultra-wide-band saw sensor with hyperbolically frequency-modulated etched reflector
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US Patent 11264969 Transversely-excited film bulk acoustic resonator comprising small cells
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Patent Primary Examiner
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Jeffrey M Shin
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CPC Code
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H03H 9/2405
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H03H 9/13
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H05K 7/2039
0

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