Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 25, 2023
0Patent Application Number
166694990
Date Filed
October 30, 2019
0Patent Primary Examiner
A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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