US Patent 11640899 Atomic layer etching processes
Is a
Date Filed
October 25, 2021
0
Date of Patent
May 2, 2023
0
Patent Application Number
17452156
0
Patent Inventor Names
Varun Sharma
0
Marko J. Tuominen
0
Suvi P. Haukka
0
Tom E. Blomberg
0
Chiyu Zhu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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