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US Patent 11640938 Semiconductor device formed on SOI substrate
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Patent
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Date Filed
August 30, 2021
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Date of Patent
May 2, 2023
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Patent Application Number
17460998
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Patent Citations
US Patent 10868023 Non-volatile memory array
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US Patent 10879165 Semiconductor device and method for manufacturing semiconductor device with low-permittivity layers
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US Patent 10236364 Tunnel transistor
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Patent Inventor Names
Hae Taek Kim
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Seung Hyun Eom
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Sang Yong Lee
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Ki Won Lim
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Jin Hyo Jung
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Ja Geon Koo
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Hyun Joong Lee
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11640938
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Patent Primary Examiner
Laura M Menz
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CPC Code
H01L 23/5222
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H01L 27/1203
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H01L 23/528
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