Patent attributes
A flow control module with a thermal mass flow meter is provided. The thermal mass flow meter facilitates measuring both a flow rate and a temperature of a fluid passing through the flow control module. Fluids may experience different flow characteristics at different temperature ranges. The flow control module includes a proportional control valve for selectively adjusting the flow rate of the fluid passing through the flow control module. Upon detecting that the temperature of the fluid is outside of a temperature range for the fluid, a controller is configured to load a different set of calibration parameters for controlling the operation of the proportional control valve to accommodate the different flow characteristics of the fluid at that temperature. Additionally, the controller is configured to detect bubbles using the thermal mass flow meter based upon the difference in thermal conductivity of gasses and liquids.
