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US Patent 11656184 Macro inspection systems, apparatus and methods
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Patent
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Current Assignee
Nanotronics Imaging
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Date Filed
August 5, 2022
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Date of Patent
May 23, 2023
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Patent Applicant
Nanotronics Imaging
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Patent Application Number
17817826
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Patent Citations
US Patent 7176433 Resolution enhancement for macro wafer inspection
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US Patent 7457446 Fully automatic rapid microscope slide scanner
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US Patent 9769392 Imaging system for addressing specular reflection
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US Patent 10048477 Camera and specimen alignment to facilitate large area imaging in microscopy
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11656184
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Patent Primary Examiner
Sang H Nguyen
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CPC Code
G01N 2021/8835
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G02B 21/06
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G02B 21/365
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G02B 21/26
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G02B 21/084
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G02B 21/0016
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G03B 15/06
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G01N 21/956
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G01N 21/8806
0
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