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US Patent 11658041 Methods of modifying portions of layer stacks

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Date Filed
January 25, 2021
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Date of Patent
May 23, 2023
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
17157546
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Patent Citations
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US Patent 9960045 Charge-trap layer separation and word-line isolation for enhanced 3-D NAND structure
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US Patent 7902661 Integrated circuit micro-module
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US Patent 9412581 Low-K dielectric gapfill by flowable deposition
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US Patent 9646876 Aluminum nitride barrier layer
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US Patent 9865459 Plasma treatment to improve adhesion between hardmask film and silicon oxide film
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US Patent 10629484 Method of forming self-aligned via
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11658041
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Patent Primary Examiner
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Roberts P Culbert
0

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