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US Patent 11664283 Raman sensor for supercritical fluids metrology
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Is a
Patent
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Current Assignee
Tokyo Electron
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Date Filed
August 20, 2021
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Date of Patent
May 30, 2023
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Patent Applicant
Tokyo Electron
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Patent Application Number
17445570
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Patent Citations
US Patent 7102132 Process monitoring using infrared optical diagnostics
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US Patent 7604010 Film formation apparatus and method of using the same
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US Patent 10837902 Optical sensor for phase determination
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11664283
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Patent Primary Examiner
David G Cormier
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CPC Code
G01N 21/65
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H01L 22/26
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H01L 21/02041
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H01L 21/02043
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H01L 21/02052
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H01L 21/02054
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H01L 21/02057
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H01L 21/02101
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H01L 21/67017
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H01L 21/67023
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