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US Patent 11665987 Integrated switch using stacked phase change materials
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Is a
Patent
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Date Filed
March 4, 2021
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Date of Patent
May 30, 2023
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Patent Application Number
17192223
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Patent Citations
US Patent 9647209 Integrated phase change switch
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US Patent 9419213 Directly heated RF phase change switch
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US Patent 10164608 Switch with phase change material
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US Patent 7579616 Four-terminal programmable via-containing structure and method of fabricating same
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US Patent 9257647 Phase change material switch and method of making the same
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11665987
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Patent Primary Examiner
Jerome Leboeuf
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CPC Code
H01L 27/2436
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H01L 45/06
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H01L 45/14
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H01L 45/1616
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H01L 45/1675
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H01L 45/1691
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G11C 13/0004
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G11C 2013/008
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H01L 45/126
0
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