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US Patent 11670483 High power wafer cooling
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Patent
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Current Assignee
Axcelis Technologies
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Date Filed
April 28, 2020
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Date of Patent
June 6, 2023
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Patent Applicant
Axcelis Technologies
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Patent Application Number
16860386
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Patent Citations
US Patent 8101488 Hydrogen implantation with reduced radiation
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11670483
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Patent Primary Examiner
Rudy Zervigon
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CPC Code
H01J 2237/303
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H01J 37/30
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H01J 37/32412
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H01L 21/3065
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H01L 21/30604
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H01L 21/6719
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H01L 21/67196
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H01L 21/67201
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H01L 21/67173
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H01L 21/67184
0
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