Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 6, 2023
0Patent Application Number
172185030
Date Filed
March 31, 2021
0Patent Citations
...
Patent Primary Examiner
A semiconductor device includes power rails in a first interconnect structure on a backside of the semiconductor device. The semiconductor device further includes a gate-all-around (GAA) transistor having multiple channel layers stacked over the first interconnect structure, a gate stack wrapping around each of the multiple channel layers except a bottommost one of the multiple channel layers, and a source/drain feature adjoining the channel layers. The semiconductor device further includes a first conductive via connecting the first interconnect structure to a bottom of the source/drain feature and a dielectric feature isolating the bottommost one of the multiple channel layers from the first conductive via.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.