Patent attributes
A diagnostics system, for mass flow controller calibration, comprising a controller communicable coupled to a sensor(s) and a valve. The controller controls the valve based on a predetermined set point value and communication from the at least one sensor. The controller determines a number of set point value adjustments and compares results of a calibration operation and a set point value plus a tolerance value. The controller generates a notification message indicating at least one of the predetermined number of set point value adjustments and results of the comparing. The controller calibrates the mass flow controller based on, at least in part, one of a predetermined number of set point value adjustments, results of the comparison, and user input. The notification message can comprise temperature values, valve drive values, sensor flow rate values, gas flow hours, and a remaining number of set point adjustments based on a total fluid hours.
