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US Patent 11676793 Apparatus of plural charged particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
November 8, 2019
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Date of Patent
June 13, 2023
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Patent Application Number
16679023
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Patent Citations
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US Patent 9349571 Particle optical system
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US Patent 8698093 Objective lens with deflector plates immersed in electrostatic lens field
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US Patent 9418815 Tubular permanent magnet used in a multi-electron beam device
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US Patent 8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens
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US Patent 8389935 Charged particle beam apparatus permitting high-resolution and high-contrast observation
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11676793
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Patent Primary Examiner
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Sean M Luck
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CPC Code
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H01J 37/12
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H01J 37/14
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H01J 37/141
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H01J 37/143
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H01J 37/26
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H01J 37/285
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H01J 37/145
0
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H01J 37/10
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