US Patent 11691883 Synthesis of trichlorosilane from tetrachlorosilane and hydridosilanes
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US Patent 11691883 Synthesis of trichlorosilane from tetrachlorosilane and hydridosilanes
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The invention relates to a process for the preparation of trichlorosilane (HSiCl3) which comprises the reaction of tetrachlorosilane (SiCU) with hydridosilanes in the presence of a catalyst.
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Patent Jurisdiction
Patent Number
116918830
Date of Patent
July 4, 2023
0Patent Application Number
172737960
Date Filed
September 5, 2019
0Patent Primary Examiner
CPC Code
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