Patent attributes
A laser sensor module for detecting a particle density of small particles with a particle size between 0.05 μm and 10 μm includes a first laser configured to emit a first measurement beam, a second laser configured to emit a second measurement beam, and an optical arrangement configured to focus the first measurement beam to a first measurement volume and to focus the second measurement beam to a second measurement volume. The optical arrangement includes a first numerical aperture and a second numerical aperture arranged to detect a predetermined minimum particle size. The laser sensor module further includes a first detector configured to determine a first self-mixing interference signal of a first optical wave, a second detector configured to determine a second self-mixing interference signal of a second optical wave, and an evaluator.
