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US Patent 11693230 Optical device

Patent 11693230 was granted and assigned to Hamamatsu Photonics on July, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent
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Patent attributes

Patent Applicant
Hamamatsu Photonics
Hamamatsu Photonics
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Current Assignee
Hamamatsu Photonics
Hamamatsu Photonics
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116932300
Date of Patent
July 4, 2023
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Patent Application Number
167621740
Date Filed
September 4, 2018
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Patent Citations
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US Patent 7699296 Method and apparatus for an actuator having an intermediate frame
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US Patent 8353600 MEMS actuator assembly for optical switch
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US Patent 8729770 MEMS actuators with combined force and bi-directional rotation
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US Patent 11187872 Optical device
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Patent Citations Received
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US Patent 12136893 Optical device having fixed and movable comb electrodes
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Patent Primary Examiner
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Balram T Parbadia
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CPC Code
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G02B 26/0833
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G02B 26/08
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H02N 1/008
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B81B 2201/042
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G02B 7/1821
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B81B 2203/0154
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B81B 3/0045
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G02B 26/0841
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...

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

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