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US Patent 11699602 Substrate support assemblies and components

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Date Filed
July 7, 2020
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Date of Patent
July 11, 2023
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
16922404
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Patent Citations
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US Patent 10177024 High temperature substrate pedestal module and components thereof
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US Patent 8071920 Planar heater
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US Patent 9245744 Combinatorial plasma enhanced deposition and etch techniques
0
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US Patent 10704142 Quick disconnect resistance temperature detector assembly for rotating pedestal
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11699602
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Patent Primary Examiner
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Mohammed Shamsuzzaman
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CPC Code
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H01L 21/68742
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H01L 21/68771
0
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H01L 21/67103
0
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H01L 21/68764
0
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H01L 21/68792
0
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H01L 21/67313
0

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