US Patent 11701749 Monitoring of vibrations during chemical mechanical polishing
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US Patent 11701749 Monitoring of vibrations during chemical mechanical polishing
Article
A chemical mechanical polishing apparatus includes a platen to support a polishing pad, the platen having a recess, a flexible membrane in the recess, and an in-situ vibration monitoring system to generate a signal. The in-situ acoustic monitoring system includes a vibration sensor supported by the flexible membrane and positioned to couple to an underside of the polishing pad.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
117017490
Date of Patent
July 18, 2023
0Patent Application Number
163519540
Date Filed
March 13, 2019
0Patent Citations
Patent Primary Examiner
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