US Patent 11703505 Nano-dynamic biosensor and fabrication method therefor

The present invention relates to a nano-dynamic biosensor and a fabrication method therefor. A biosensor according to the present invention comprises a substrate having a hollow structure and a graphene layer formed thereon wherein a probe material is bound to the surface of the graphene layer and the resonance vibration of the hollow structure formed in the substrate is modulated as the probe material increases in weight when a target material to be detected is coupled to the probe material without being labeled, whereby the biosensor is expected to take advantage of the modulation to measure the coupling of the target material including vaccinia virus with high sensitivity on a femtogram (10