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US Patent 11703673 Compact microscope

OverviewStructured DataIssuesContributors

Contents

Is a
Patent
Patent
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Patent attributes

Patent Applicant
Oxford University Innovation
Oxford University Innovation
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Current Assignee
Oxford University Innovation
Oxford University Innovation
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
117036730
Date of Patent
July 18, 2023
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Patent Application Number
170752040
Date Filed
October 20, 2020
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Patent Citations
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US Patent 7897942 Dynamic tracking of wafer motion and distortion during lithography
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US Patent 10330904 Compact microscope
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US Patent 10962755 Compact microscope
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US Patent 7706597 Defect inspection apparatus and defect inspection method
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Patent Primary Examiner
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Stephone B. Allen
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CPC Code
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G02B 21/26
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G02B 21/28
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G02B 21/36
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G02B 21/361
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G02B 21/362
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G02B 27/10
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G02B 27/1006
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G02B 27/1013
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A compact microscope including an enclosure, a support element, a primary optical support element located within the enclosure and supported by the support element, at least one vibration isolating mount between the support element and the primary optical support element, a sample stage supported on the primary optical support element to support a sample, a return optical system to receive returned light from a sample and transmit returned light to a detection apparatus, wherein the return optical system is mounted on the primary optical support element, and wherein the compact microscope include a at least one of the following elements; a) an objective lens system, b) a temperature-control system, and c) the return optical system being operable to separate returned light into at least a first wavelength band and a second wavelength band.

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