US Patent 11709045 Surface texture probe and measurement apparatus with a vibrational membrane

A surface texture probe and a surface texture measurement apparatus with a vibrational membrane are provided. The probe includes a housing and a vibrational membrane, a stylus holder, a vertical guide assembly, a guide adjustment assembly and a stylus. An inner end of the vibrational membrane is attached to an upper end of the stylus holder. An outer end of the vibrational membrane is fixed to a vibrational membrane connection assembly fixedly connected to the housing. The vertical guide assembly is fixed inside the housing and slidably connected to the stylus holder and configured to guide the stylus holder to move in a vertical direction. The stylus is fixed to a lower end of the stylus holder. The guide adjustment assembly is mounted on the vertical guide assembly and configured to adjust a sliding friction force between the vertical guide assembly and the stylus holder.