Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 25, 2023
0Patent Application Number
172463250
Date Filed
April 30, 2021
0Patent Primary Examiner
The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
