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US Patent 11715615 Light modulated electron source

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
July 6, 2022
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Date of Patent
August 1, 2023
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Patent Application Number
17858943
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Patent Citations
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US Patent 7888654 Cold field emitter
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US Patent 7928382 Detector and inspecting apparatus
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US Patent 8247070 Crystalline nanostructures
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US Patent 9748071 Individually switched field emission arrays
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US Patent 9966230 Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer
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US Patent 10133181 Electron source
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US Patent 10199197 Photocathode including silicon substrate with boron layer
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US Patent 10643819 Method and system for charged particle microscopy with improved image beam stabilization and interrogation
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US Patent 10558123 Electron source
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US Patent 10748730 Photocathode including field emitter array on a silicon substrate with boron layer
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11715615
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Patent Primary Examiner
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Jason L McCormack
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CPC Code
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H01J 3/022
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H01J 37/26
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H01J 37/00
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H01J 37/02
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H01J 37/28
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H01J 37/3174
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H01J 37/243
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H01J 35/065
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H01J 2237/06333
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H01J 2237/0635
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•••

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