US Patent 11715667 Thermal process chamber lid with backside pumping
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US Patent 11715667 Thermal process chamber lid with backside pumping
Article
Process chamber lid assemblies and process chambers comprising same are described. The lid assembly has a housing with a gas dispersion channel in fluid communication with a lid plate. A contoured bottom surface of the lid plate defines a gap to a top surface of a gas distribution plate. A pumping channel is formed between an upper outer peripheral contour of the gas distribution plate and the lid plate.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
117156670
Date of Patent
August 1, 2023
0Patent Application Number
177208360
Date Filed
April 14, 2022
0Patent Citations
Patent Primary Examiner
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