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Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ventsislav Yantchev
Date of Patent
September 5, 2023
Patent Application Number
17584324
Date Filed
January 25, 2022
Patent Citations
...
Patent Primary Examiner
An acoustic resonator device includes a substrate and a piezoelectric plate. A first portion of the piezoelectric plate is on the substrate. A second portion of the piezoelectric forms a diaphragm suspended over a cavity in the substrate. An interdigital transducer (IDT) is on a surface of the piezoelectric plate, the IDT including first and second busbars on the first portion and interleaved IDT fingers on the diaphragm. A plurality of tethers support the diaphragm over the cavity, each tether providing an electrical connection between a corresponding one of the interleaved IDT fingers and one of the first and second busbars.
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