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US Patent 11751388 3-dimensional nor strings with segmented shared source regions

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11751388
Patent Inventor Names
Raul Adrian Cernea
Eli Harari
Date of Patent
September 5, 2023
Patent Application Number
17721247
Date Filed
April 14, 2022
Patent Citations
‌
US Patent 10395737 Three-dimensional vertical NOR flash thin-film transistor strings
‌
US Patent 10692837 Chip package assembly with modular core dice
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US Patent 10692874 3-dimensional NOR string arrays in segmented stacks
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US Patent 10950616 3-dimensional NOR strings with segmented shared source regions
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US Patent 11309331 3-dimensional NOR memory array architecture and methods for fabrication thereof
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US Patent 11335693 3-dimensional NOR strings with segmented shared source regions
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US Patent 7223653 Process for forming a buried plate
‌
US Patent 7307308 Buried bit line non-volatile floating gate memory cell with independent controllable control gate in a trench, and array thereof, and method of formation
...
Patent Primary Examiner
‌
Tan T. Nguyen

A NOR string includes a number of individually addressable thin-film storage transistors sharing a bit line, with the individually addressable thin-film transistors further grouped into a predetermined number of segments. In each segment, the thin-film storage transistors of the segment share a source line segment, which is electrically isolated from other source line segments in the other segments within the NOR string. The NOR string may be formed along an active strip of semiconductor layers provided above and parallel a surface of a semiconductor substrate, with each active strip including first and second semiconductor sublayers of a first conductivity and a third semiconductor sublayer of a second conductivity, wherein the shared bit line and each source line segment are formed in the first and second semiconductor sublayers, respectively.

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