Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11752516 Apparatus for processing substrate

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
November 4, 2021
Date of Patent
September 12, 2023
Patent Application Number
17453506
Patent Citations
‌
US Patent 11513083 Photolithography method and photolithography system
‌
US Patent 11208725 Substrate processing apparatus
‌
US Patent 11273464 Substrate processing apparatus
‌
US Patent 7344600 Substrate treatment apparatus
‌
US Patent 7582163 Apparatus for processing surface of substrate
‌
US Patent 7615117 Coating and processing apparatus and method
‌
US Patent 7802536 Apparatus and method of forming an applied film
‌
US Patent 7891366 Liquid processing apparatus
‌
US Patent 8166913 Coating treatment method, computer-readable storage medium, and coating treatment apparatus
‌
US Patent 8256370 Coating apparatus and method
•••
Patent Inventor Names
Dongkeun Lee
Jongho Park
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11752516
Patent Primary Examiner
‌
Jethro M. Pence

Find more entities like US Patent 11752516 Apparatus for processing substrate

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo