Patent attributes
A case data set storage unit includes a plurality of case data sets including difference data representing, a variation from measurement data taken at an initial state to measurement data taken at a plurality of points of time for the same sample under the same measurement condition. An aging degradation estimation unit uses these case data sets to output difference data representing an estimate value of a variation from the measurement data taken at the initial state to measurement data taken, by a measurement device, at or after a first elapsed time, based on difference data representing a variation from the measurement data taken at the initial state to measurement data taken at a plurality of points of time that precede the first elapsed time. An aging degradation correction unit corrects the measurement data taken at or after the first elapsed time, based on the output difference data.
