Patent attributes
A method for manufacturing a semiconductor device is provided. In the method, first substrate is prepared. Each of the first substrates has first product regions. The first substrates are stacked, thereby electrically connecting different layers of the first substrates via a through-electrode. A second substrates having second product regions is prepared. Second semiconductor chips are attached to the second product regions. The second semiconductor chips are attached to the second substrate on a top layer of the first substrates. The second substrate is removed from the second semiconductor chips. First electrode pads of the top layer are electrically connected to second electrode pads of the second semiconductor chips via through-electrodes. The second semiconductor chips are connected to each other in parallel. The first and second product regions are separated, thereby manufacturing semiconductor chip stacks including more semiconductor chips in the top layer than the other layers.