US Patent 11760624 Micro-electromechanical transducer
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US Patent 11760624 Micro-electromechanical transducer
Article
Patent abstract
A micro-electromechanical transducer including one or more moveable members, and a viscoelastic substance having a predetermined viscoelasticity, the viscoelastic substance being adapted to influence the response of the transducer in a predetermined manner. The micro-electromechanical transducer of the present invention may include a MEMS transducer, such as a MEMS microphone, a MEMS vibration sensor, a MEMS acceleration sensor, a MEMS receiver.
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Patent Inventor Names
Alwin Fransen
Dion Ivo de Roo
Frederik Cornelis Blom
Pavlo Mulyar
Peter Christiaan Post
Raymond Mogelin
Date of Patent
September 19, 2023
Patent Application Number
17749378
Date Filed
May 20, 2022
Patent Citations
Patent Primary Examiner
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