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US Patent 11764149 Semiconductor device
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Patent
Date Filed
July 18, 2022
Date of Patent
September 19, 2023
Patent Application Number
17866782
Patent Citations
US Patent 8178439 Surface cleaning and selective deposition of metal-containing cap layers for semiconductor devices
US Patent 8395206 Semiconductor device and method of fabricating the same
US Patent 8466055 Semiconductor device and method of manufacturing semiconductor device
US Patent 9087723 Field effect transistor and method of fabricating the same
US Patent 9536964 Method for forming via profile of interconnect structure of semiconductor device structure
US Patent 9553017 Methods for fabricating integrated circuits including back-end-of-the-line interconnect structures
US Patent 9859432 Semiconductor devices having spacer protection pattern
US Patent 10079305 Semiconductor device and method of fabricating the same
US Patent 10361310 Method of fabricating semiconductor devices
US Patent 10475739 Semiconductor device
•••
Patent Inventor Names
Wookyung You
Suhyun Bark
Kyeongbeom Park
Jongmin Baek
Jangho Lee
Deokyoung Jung
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11764149
Patent Primary Examiner
Laura M Menz
CPC Code
H01L 27/088
H01L 23/528
H01L 23/5226
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