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US Patent 11765905 Semiconductor memory device
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Patent
Date Filed
February 25, 2021
Date of Patent
September 19, 2023
Patent Application Number
17185168
Patent Citations
US Patent 10381374 Semiconductor memory
US Patent 10304852 Three-dimensional memory device containing through-memory-level contact via structures
US Patent 8846494 Alignment marks and alignment methods for aligning backside components to frontside components in integrated circuits
Patent Inventor Names
Han-sik Yoo
Taehyun An
Yoosang Hwang
Sangyeon Han
Euichul Jeong
Kiseok Lee
Hyungeun Choi
Seungjae Jung
Sung-hwan Jang
Jong-ho Moon
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11765905
Patent Primary Examiner
Shahed Ahmed
CPC Code
H01L 21/76897
H01L 27/11575
H01L 27/11582
H01L 27/11578
H01L 27/11565
H01L 27/11551
H01L 27/11526
H01L 27/11519
H01L 23/5283
H01L 23/5226
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