Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xin Su
Gi-Youl Kim
Zhuo Wang
Huaqiang Tan
Date of Patent
September 26, 2023
Patent Application Number
17110516
Date Filed
December 3, 2020
Patent Citations
Patent Primary Examiner
Patent abstract
The invention discloses a gas dispensing apparatus for multiple chemical resources, including: a showerhead assembly having at least two layers of board bodies and a gas mixing chamber defined at a center of the at least two layers of board bodies, and the gas mixing chamber having multiple holes defined thereon; and a pipeline assembly mounted to the showerhead assembly and having a stepped body defining at least two pipelines, the stepped body being configured to connect to the at least two layers of the board bodies to define at least two gas cavities, each of the gas cavities communicating with the corresponding one of the pipelines, each of the gas cavities communicating with the holes defined on the gas mixing chamber.
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